Maintenance of X Precision Optical Coating Machine What are the differences between sputter coating and evaporative coating?
We can understand the maintenance measures of the precision optical coating machine during maintenance. We will understand the following contents.
One: Regular replacement of diffusion pump oil
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The diffusion pump oil is used for a period of time, about two shifts in two months: due to the long-term high temperature environment, although the diffusion pump is started at a higher vacuum, the residual oxygen and other components are still reacted with the diffusion pump oil, and the diffusion pump oil Cracking may also occur at high temperatures, causing a decrease in quality and prolonged pumping time. When we think that the time is extended too much, it should be replaced.
Two: vacuum pump
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When the pump oil is used and the pump oil is kept for two months, the oil quality will change. Because the oil may be drawn into moisture, impurities, and other causes, the oil viscosity is deteriorated and the vacuum is lowered, so it needs to be replaced. If it is a new equipment, it should be replaced within the first half of the use. Because during the running-in period, the oil contains more abrasive iron powder, which will aggravate the wear.
Three: clean and hygienic
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Regularly clean the equipment and its surrounding environment, often keep the inside and outside of the equipment clean, organize the environment around the equipment, and have a good working environment to ensure safety.
What is the difference between sputter coating and evaporative coating?
What is the difference between sputter coating and evaporative coating? The evaporation coating is to heat the target so that the surface components are evaporated in the form of atomic groups or ions, and settle on the surface of the substrate, and a film is formed by a film formation process (scatter-island structure-vap structure-layer growth).
The uniformity of the evaporation coating composition is not very easy to guarantee, and the specific control factors are the same as above, but because of the limited principle, the composition uniformity of the evaporation coating is not good for the non-single progenitor coating.
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Sputter coating can be simply understood as bombardment of a target with electrons or high-energy lasers, and surface components are sputtered out as atomic or ionic, and finally deposited on the surface of the substrate, undergoing a film formation process, and finally forming a film. Vacuum coating machine equipment.
Sputter coatings are further divided into many types, and the difference from evaporation coatings is that the sputtering rate will be one of the main parameters.