PVD equipment: high vacuum automatic blister forming machine
Magnetron sputtering technology is a kind of PVD (Physical Vapor Deposition) technology and is one of the important methods for preparing thin film materials. It uses the characteristics of a charged particle that has a certain kinetic energy after being accelerated in an electric field. It directs ions to a target electrode (cathode) made of the material being sputtered, and sputters the target atoms along a certain distance. A method of moving in a direction to a substrate and finally depositing a film on the substrate. The magnetron sputtering equipment enables the thickness and uniformity of the coating to be controlled, and the prepared film has good compactness, strong adhesion and high purity. This technology has become an important means for preparing various functional films. Major breakthroughs have been made in a number of key technical fields, such as the production and control of Titanium ion, chamber design and simulation technology, and excellent thin film deposition process results.
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A series of magnetron sputtering PVD products, such as TiN Hardmask PVD, Al pad PVD, AlN PVD, TSV PVD, successfully developed by Baorui Titanium Co., Ltd. Comprehensive product layout in the field. Among them, Hardmask PVD equipment used in 28nm / 300mm wafer production has become the Baseline equipment of mainstream chip foundries in China, representing the highest level of domestic integrated circuit process equipment, and has successfully entered the international supply chain system.
The compact chamber structure design and unique air intake structure improve the purging effect of precursors and shorten the ALD process time.
Efficient precursor transport system, advanced process forms, improve the transport efficiency of precursors and reduce the consumption of precursors.
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Lower operating costs and spare parts costs Mature process control meets the high-end needs of 28-14nm and lower technology generations.
Special heating base, low energy consumption, high-precision temperature field control, and good temperature repeatability.
With a variety of safety alarm protection, safety interlock, history, operation log query and other functions. The machine complies with the semi standard, complete functions, and software operation interface meets the needs of large