Vacuum coating machine maintenance problem vacuum evaporation aluminum coating
In industrial production, vacuum coating machines can be used in many industries, such as watchmaking, automotive, hardware, etc., but long-term use of vacuum coating machine will inevitably encounter failure problems, how to repair if there is a failure? Introduced by a professional vacuum coating machine manufacturer.
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In all parts of the vacuum coating machine, if the diffusion pump is used continuously for more than 6 months, the pumping speed will be significantly slower, or it may be mishandled and filled into the atmosphere. The maintenance method is: remove the connecting water pipe, remove the electric hot plate, screw out the first-stage nozzle, first clean the pump cavity and the pump with gasoline, and then wash it with water, then wash it thoroughly with water. After the water is evaporated, the pump is installed, the new diffusion pump oil is added, and the body is replaced, the water pipe is connected, and the electric stove is installed, and the machine can be restarted. Pay attention to leak detection before restarting. Start the maintenance pump, close the door, and after a few minutes, observe whether the partial vacuum of the diffusion pump reaches 6X10 Pa, otherwise it will be leak tested. Check for a seal ring at the joint or crush the seal. It can be heated after eliminating the hidden danger of gas leakage, otherwise the diffusion pump oil will burn the ring and cannot enter the working state.
Vacuum evaporation aluminum coating
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In the preparation of pure metal coatings, vacuum evaporation is mostly used. The aluminum coating in pure metal is widely used, such as aluminum-based silver in the mirror industry, aluminum etching wire in integrated circuits, aluminum-plated capacitor on the surface of polyacid film, and aluminum-plated polyester film. Food soft packaging to prevent ultraviolet radiation; polyester polyester film is coated with cobalt and then plated with aluminum to make tape. Therefore, this year, the vacuum aluminum plating industry has not only developed rapidly at home and abroad, but also is developing in the field of coating technology such as sputtering and ion plating.
Vacuum evaporation of aluminum film can be selected by batch evaporation coating, or semi-continuous vacuum coating machine. The evaporation source can be a resistance source, an electron beam source, or an induction heating evaporation source, which can be determined according to the specific requirements of the vapor deposition film.
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The process parameters of the vacuum evaporation aluminum coating mainly include the pressure of the evaporation chamber, the deposition rate, the substrate temperature, the evaporation distance and the like. If considering the uniformity of distribution on the diaphragm substrate, attention should also be paid to factors such as the relative position of the evaporation source to the substrate and the motion state of the workpiece holder. For example, when using an electron beam evaporation source for aluminum coating preparation, the typical main process parameters can be selected: working chamber pressure is 2.6X10-4Pa, evaporation rate is 2~2.5nm/s, substrate temperature is 20°C, steaming The distance from 450 nm, the electron beam gun voltage is 9 kV, and the current is 0.2 A.
Experiments show that the film thickness dispersion obtained by electron beam evaporation method is large, that is, the uniformity is poor. This is also one of the reasons why vacuum aluminum plating films have been developed to produce aluminum films toward sputtering and ion plating in recent years.