0315-6985576

baoruitj@163.com

BAORUI TITANIUM EQUIPMENT

The principle of vacuum coating machine sputtering is why vacuum coating machine should be cleaned regularly?

2019-12-04 14:56  Times of view:

Sputtering, generally referred to as magnetron sputtering, is attributed to high-speed low-temperature sputtering.

The skill request vacuum is filled in a 1 x 10-3 Torr, that is, a vacuum condition of 1.3 x 10-3 Pa, filled with a lazy gas argon (Ar), and between the plastic substrate (anode) and the metal target (cathode). In addition to high-voltage direct current, the electrons generated by the glow discharge ignite the lazy gas, and the plasma is generated. The plasma blasts the atoms of the metal target and deposits on the plastic substrate.

What is the principle of vacuum coating machine sputtering?

Charged particles with kinetic energy of tens of electron volts or higher can be used to bombard the surface of the material and cause it to be sputtered out into the gas phase for etching and coating. The number of atoms sputtered by one ion is called the yield of the sputtering. The higher the yield, the faster the sputtering rate is, the highest is Cu, Au, Ag, etc., and the lowest is Ti, Mo, Ta, W, and the like. Generally at 0.1-10 atoms/ion. The ions can be generated by a DC glow discharge. At a vacuum of 10-1 - 10 Pa, a high voltage is applied between the two poles to generate a discharge. The positive ions will bombard the target of the negative electricity and sputter the target, and the plating is plated. On the object.

The current density of a normal glow discharge is related to the cathode material and shape, gas species pressure, and the like. It should be kept as stable as possible during sputtering. Any material can be sputter coated, even if the high melting point data is simply sputtered, but the non-conducting target must be sputtered by radio frequency (RF) or pulse; and because of poor conductivity, the sputtering power and speed are better. low. Metal sputtering power up to 10W/cm2, non-metal <5W/cm2

Why should the vacuum coating machine be cleaned regularly?

Zunhua Baorui Titanium Equipment

vacuum coating machine,pvd coating machine,pvd vacuum machine,vacuum ion coating machine,multi-arc ion coating machine

After the vacuum coating machine has been used for a long time, it should be cleaned regularly. Many people will ask why? What problems will occur if you do not clean frequently? Let us analyze it.

Before the vacuum coating machine uses the coating material coating, simple surface cleaning of the coating material can prolong the life of the coating machine, because various pollutants not only can not obtain the required vacuum degree of the vacuum system, but also affect the connection of the vacuum parts. Strength and sealing performance.

Common contaminants in vacuum coating machines are:

Zunhua Baorui Titanium Equipment

vacuum coating machine,pvd coating machine,pvd vacuum machine,vacuum ion coating machine,multi-arc ion coating machine

1. Grease includes lubricants, cutting fluids, vacuum greases, etc. that are contaminated during processing, assembly, and operation;

2. Hand sweat during operation, water vapor and saliva when blowing, etc.; residual substances in the cleaning of acid, alkali and salt substances, hand sweat, minerals in water, etc.; and polishing residue and ambient air Dust and other organic matter.

Zunhua Baorui Titanium Equipment

vacuum coating machine,pvd coating machine,pvd vacuum machine,vacuum ion coating machine,multi-arc ion coating machine

service hotline

0315-6985576

Wechat Service

Contact us
Top