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Improvement of vacuum-controlled magnetic field control source for vacuum coating

2019-08-16 10:47  Times of view:

The improvement of the dynamic magnetic field destroying source in the vacuum coating includes the target substrate in the vacuum deposition chamber, the outer portion of the front surface of the target substrate, the shielding ring covering the circumferential side of the target substrate, and the sheet fixed on the front surface of the target substrate. The target, the inner magnetic steel mounted on the magnetic steel substrate at the center of the target substrate direction, the magnetic steel substrate disposed on the back surface of the target substrate, and the annular outer magnetic steel at the circumferential position are combined.

Improve:

Zunhua Baorui Titanium Equipment

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The magnetic steel substrate: the diameter of the target larger than the diameter of the target is smaller than the diameter of the target, the magnetic steel substrate is fixed on a side of the spur gear offset from the axis of the target substrate, and the magnetic ring engaged with the spur gear is mounted on the coating frame, and the gear is mounted on the handle The motor on the rear side of the spur gear is mounted on the frame, and the motor power output shaft and the ring gear are disposed coaxially with the target substrate, and the motor power output shaft is fixed to the handle.

Effect: Improve the utilization rate of the target and improve the coating quality. The magnetic field can be revolved and rotated in a ring shape, which is sufficient to scan any part of the target, so that the larger area of the target is uniformly extinguished.

Zunhua Baorui Titanium Equipment

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Summarize the characteristics of the dynamic magnetic field magnetron source of this vacuum coating process:

1. The distance of the axis of the magnetic steel substrate from the axis of the target substrate plus the radius of the magnetic steel substrate is equal to or close to the length of the radius of the target.

Zunhua Baorui Titanium Equipment

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2. Install a ring gear that meshes with the spur gear on the frame of the vacuum coater, and mount the motor on the rear side of the spur gear on the frame. The gear shaft is mounted on the handle, and the crankshaft is fixed on the motor power output shaft. The substrate is fixed on a side of a spur gear, the diameter of the magnetic steel substrate is larger than the diameter of the target than the diameter of the target, and the axis of the magnetic steel substrate is offset from the axis of the target substrate.

3. The ring gear is coaxial with the target substrate and the motor power output shaft.

Zunhua Baorui Titanium Equipment

vacuum coating machine,pvd coating machine,pvd vacuum machine,vacuum ion coating machine,multi-arc ion coating machine

4. The difference between the ring diameter of the ring gear and the diameter of the inner magnetic steel is equal to or greater than the diameter of the inner magnet.

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