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High-precision automatic vacuum coating machine light control system description

2019-12-23 17:33  Times of view:

Fully consider that the domestic coating machine still stays in the high-precision automatic light control system designed and developed by the defects of crystal control operation, few coating layers, poor central wavelength positioning, no automatic light control system, high voltage instability, etc. The number of continuous coating layers can reach 100 layers, which greatly improves the qualification rate of coating products, and is especially suitable for the monitoring of various film systems including the monitoring of irregular membranes.

This system introduces a total of 4 chapters:

Chapter 1: Introduction to the function of optical signal interface;

Chapter 2: Introduction to membrane interface functions;

Chapter 3: Operation steps of the light control system;

Chapter 4: Notes and computer connection diagram.

Chapter 1: Optical Signal Interface Function

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2, edit - cut, copy, paste, delete.

3. View. View the 360 bill of materials - averaging to homogenize the optical signal curve.

4. Help. The system data description includes viewing the system serial number.

5. Action. The transport film is attached to the 360-collecting optical signal.

6. Open. Open the file dialog.

7, stop. Stop the computer to collect the optical signal of the film thickness meter. It is forbidden to use during the coating process.

8, attributes. Divided into optical signals, control systems, and other three parts.

9. Exit. Refers to exit control system back to the desktop.

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10. In the form. The vertical X table is the percentage of reflection or transmittance. The horizontal Y table is the time unit of seconds S.

11, below the table. The reflectivity or transmittance is shown numerically.

12. The right side of the table shows the current layer data during the coating process.

Chapter 2: Membrane input interface function

1, file, edit, view, help, action, open, stop, attribute, exit These nine functions are the same as the first chapter.

2. The bottom part of the film input interface is blue. It needs to be manually input to design the film system. The rest of the columns are automatically calculated by the computer and displayed.

3, the first column of the table monitor film. Material - refractive index.

4, the table column is erected to the left of the form.

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5, the second column from the table refers to the material - refractive index - monitoring wavelength - optical thickness - monitoring bit - rate - pre-plating - physical thickness - coating time - starting direction - theoretical minimum - theoretical maximum - starting point - stop - The number of extreme points.

6. The air refractive index in the last column of the film - refers to the refractive index of air.

7. The bottom layer of the membrane input interface. Insert-Delete-Apply-Simulate.

Chapter 3: Light control operation steps

1. The new vacuum coating machine should first confirm that the light control system is connected correctly and then turn on the computer mainframe. The display power supply enters the desktop and inserts the dongle in the computer's USB port.

2. Double-click the optical-monitoring login operating system and click the “membrane system” to enter the membrane system interface. Click the “Action” menu to select the collected optical signal to collect the optical signal and check whether the signal source meets the requirements of the light control system. On the contrary, it is necessary to adjust the optical path signal and achieve the needs of the light control system. The noise ratio cannot be greater than 0.3.

3. Click “Film” to enter the new membrane input interface or click “Open” to open the light control file and select the required file data. Click “Insert” to select the number of spaces required for the process. In the blue part, you need to enter the new film data. Click “Apply” to automatically calculate the parameter value of the white space. Open the "File" and click "Save" to save the new film data. Click on "Analog" to get the theoretical analog light signal waveform. If there is a problem with the input membrane data parameter, click “Apply” and the computer will display red at the bottom of the error data or exit the control system and return to the desktop. If there is red at the bottom of the data, it means that there is a problem with the input process parameter data. The input process parameters must be carefully checked and modified before they can be used or the process film data must be re-entered.

4. Everything is ready Click the “Start Coating” coater to enter the automatic control coating state.

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5. The semi-automatic system will pop up a small dialog window before starting the coating. Require the required wavelength. Adjust the wavelength required by the monochromator as soon as possible. Click the “OK” coating machine to start coating.

6. Semi-automatic system will also pop up a small dialogue window in the vacuum coating. It is required to change the position of the monitoring piece. Manually adjust the position of the monitoring piece as soon as possible and click “OK” system to automatically paint continuously.

7. The semi-automatic system will repeatedly pop up a small dialog window in the vacuum coating. Repeat the operation according to the 5 or 6 steps described above.

Chapter 4 Precautions and computer connection diagram

1. The ratio of the dry sound of the collected optical signal is less than 0.3. The smaller the dry sound ratio is, the better the stability of the light control system is. Otherwise, the light control system may not work properly.

2. The SWA-I-05 type monitoring method requires the extreme value method to require at least one extreme point for each film.

3, the coating machine and the light control system required to earth resistance ≤ 4Ω

4. The "red dot" in the optical signal waveform indicates the "inflection point" position.

5. In the coating process of the coating machine, it is forbidden to adjust the thickness gauge of the film except for the process.

6. Please read this manual carefully before connecting the line and using the light control system. Incorrect connection lines can cause damage to the main components of the instrument such as film thickness gauges, computers, and A/D cards.

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