Design of planetary turnover coating device

Aiming at the problems of cumbersome process and uneven film in the existing Dewar coating process of vapor deposition cylindrical cavity, a planetary turnover coating device was designed. According to the special environmental characteristics of the coating machine, the turntable adopts the design of friction planetary gears, optimizing materials, optimizing the structure, and special treatment of standard parts. Finally, the planetary turnover coating device is pollution-free, light weight, small load, stable and convenient. Clean, easy to adjust and other requirements. The vacuum technology network (http://www.chvacuum.com/) believes that the use of the planetary revolving coating device enables the cylindrical cavity Dewar to realize autobiography during revolution, realizes the one-time evaporation of the cylindrical cavity Dewar, and overcomes the original The problems caused by the third plane evaporation. The test results show that the Dewar gold-plated lead film layer is superior to the original vapor deposition method in key indicators such as adhesion and uniformity. While achieving product quality improvement, it reduces production costs and improves production efficiency.

The Dewar lead is the main channel through which the detector signal is transmitted to the outside. With the development of detection technology, the detector gradually develops from the unit to the multi-element and focal plane direction. Each detection element of the detector needs at least one signal lead out, so the number of leads increases with the increase of the number of detector elements. In focal plane devices, a silicon readout circuit based on multiplexing can greatly reduce the number of Dewar leads required, but it also requires more than a dozen. The traditional buried leads can no longer meet the production of so many leads. Lead production has become a major factor restricting the development of detectors. Creative use of thin film lead technology to solve this bottleneck problem, the unique advantages of thin film lead: a metal layer is vapor-deposited on the glass Dewar, and the lead is formed by laser etching, see. It can accurately control the lead width and spacing, greatly increase the number of electrodes, and has strong scalability. It is used in the preparation of detector leads.

The thin-film lead is prepared by evaporation method, and the gold film is prepared as lead medium. The adhesion of gold to the base material is not good. First, the metal with good adhesion to the Dewar base material is vapor-deposited, and then the gold is vapor-deposited, and the double-layer film is vapor-deposited. The glass Dewar has many problems due to its glass material, cylindrical cavity structure, one end closed, and relatively small size. The common evaporation method has many problems: manual turning over, multiple evaporation, poor film uniformity, two film thickness The large difference results in no transition metal layer at the interface, and it is easy to introduce pollution when opening the coating machine chamber for many times, resulting in low efficiency, low yield and poor reliability.

To solve these fundamental problems, it is necessary to realize one-time evaporation of the cylindrical cavity, and clamp the Dewar horizontally in the working chamber of the coating machine, so that it revolves around the common axis during the evaporation process, and at the same time auto-propagates around its own axis, and design a set The only way is the planetary revolution coating device that realizes the motion according to a certain speed ratio (revolution, rotation). Due to the particularity of the Dewar matrix structure, special process parameters, and the use of vacuum environment, it has strict requirements in terms of cost, production efficiency, and loss of precious metals. The design is restricted by many factors, and there are certain difficulties.

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According to the structure and movement requirements of the coating machine, the vertical rotation of the original rotary disk on the upper part of the coating machine is used to form a solar gear system, which drives the planetary epicyclic shaft assembly to contact a fixed plate, forming the planetary shaft assembly while revolving along the axis of the vertical cavity. , Rotates along the direction of its own horizontal rotation axis, so that the cylindrical cavity Dewar part clamped at the front end of the planetary shaft assembly forms a vertical revolution around the center of the coating machine, along the axis of the planetary shaft assembly rotation, in the horizontal plane Rotation, the structure diagram is as shown.

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The planetary gear train mechanism with fixed revolving rotation is selected, and the transmission mode of the planetary revolving coating device is mainly the following two schemes: friction wheel drive and bevel gear drive using revolution drive. Their respective advantages and disadvantages are as follows:

Advantages: simple structure, easy to manufacture, easy to adjust, easy to change the transmission ratio, small surface area, small transmission power.

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Advantages: stable transmission ratio, reliable, wide circumferential speed and power range, long life.

Disadvantages: It requires high production and processing accuracy, high installation accuracy, high cost, not easy to change the transmission ratio, large surface area, and it is not easy to install and adjust multiple planetary shaft sets.

Under the working conditions in the coating chamber, the bearing has a high probability of failure for long-term operation. The following conditions must be considered in the design: a planetary component is stuck, which should not affect the operation of other planetary components, and the evaporation process cannot be interrupted by overloading the motor , Causing the batch to be scrapped. Friction wheel drive has a strong reliability advantage. At the same time, the friction wheel drive has the advantages of low friction resistance, easy assembly and disassembly, easy cleaning, and small surface area compared with the bevel gear disk drive. After comparison, a planetary gear train mechanism scheme with friction wheel drive as the transmission mode is selected.

According to the overall design plan of the mechanism, taking into account the design ideas from complex to simple, from key to auxiliary, as shown in the figure, iterative process parameters and size check and design are carried out.

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Aiming at the current difficulties in the preparation of the cylindrical cavity glass Dewar gold-plated leads, a planetary turnover coating device is designed. The turntable adopts a friction planetary gear set, optimizing materials, optimizing the structure, reasonable selection of standard parts, special treatment, and finally achieving a compact structure of the planetary turnover coating device, no pollution, light weight, small load, stable operation, convenient cleaning, and easy The adjustment meets the environmental requirements in the vacuum chamber of the coating machine, and realizes the one-time evaporation of the small-diameter cylindrical cavity. Tests have verified that the film quality of the product processed by this planetary turnover coating device is superior to the original evaporation method in terms of adhesion, uniformity and other key indicators. While improving product quality, it greatly reduces production costs. Improve production efficiency. And provide technical reserves for the development of large-array multi-lead focal plane devices in the future.

Founded in 2015,Zunhua Baorui Titanium Equipment Co.,Ltd. is a manufacturer specializing in pvd vacuum ion coating equipment. The company’s products mainly include large plate coating machine, large tube collating machine, tool coating machine and LOW-E glass production line. Mr.Wang baijiang ,general manager of the company ,has been engaged in vacuum coating industry for more than 30 years. He continuously improve production technology, improve product performance and devote himself to provide customers with better product experience and higher production efficiency.