Magnetron sputtering high vacuum coating system

Magnetron sputtering is a relatively common physical deposition method. Magnetron sputtering is the use of a low-pressure gas discharge phenomenon in a vacuum chamber to bombard the surface of a target in a plasma state, and to control the glow discharge by a ring-shaped magnetic field to deposit the sputtered particles on the substrate. Magnetron sputtering can conveniently plate a thin film layer of a high melting point material, and a uniform film layer can be plated over a large area. 

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In the coating process, the choice of process has an important influence on the performance of the film. According to the principle of magnetron sputtering technology, combined with the practical application of the device, the required thickness of the film layer ranges from nm to μm, and the film thickness is <550 nm. It has an interference effect on light and belongs to the category of thin films. It is usually called optical film technology.

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3. Characteristics of magnetron sputtering coating: high sputtering rate and high deposition rate. The target of the sputter source has a very strong DIY selection combination.

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The magnetron sputtering cathode source is an ideal controllable source. The deposited film thickness has a good linear correlation with the sputtering source power or discharge current, so it has better controllability and better Achieve consistency and repeatability in mass production products. The sputtering source can be stably placed in the vacuum chamber for a long time to obtain a pure film layer, and the adhesion of the vacuum coating film is improved to ensure the quality of the film layer.

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Vacuum is a spatial state in which no matter exists, and it is a physical phenomenon. In "vacuum", the sound cannot be transmitted because there is no medium, but the transmission of electromagnetic waves is not affected by the vacuum. In fact, in vacuum technology, vacuum is for gas. Generally, high vacuum is obtained by oil diffusion pump, which can obtain higher vacuum than mechanical pump.

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