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Vacuum coating equipment and ion bombardment film base interface

2020-08-12 09:59  Times of view:

The vacuum technology of vacuum coating equipment is closely related to the electric vacuum industry, and the electric vacuum device is an electronic device with a "vacuum" inside. The electric light source is a branch of the electric vacuum device. It has a particularly close connection with vacuum technology. It is manifested in that almost all electric light source products are indispensable in the manufacturing process of the important process of "exhaust", and the entire exhaust process All the basic links of vacuum technology are involved; in addition, the vacuum inside the light source must be maintained for a long time, so that the light source can have stable characteristics and sufficient life.

The effect of ion bombardment of vacuum coating equipment on the interface of film substrate: When the film material atoms begin to deposit, ion bombardment will have several effects on the interface between the substrate and the coating: 1. Physical mixing, 2. Enhanced diffusion, 3. Improve the nucleation mode, 4. Preferentially remove loosely bound atoms, 5. Improved surface coverage increases diffraction.

1. Physical mixing This mixing can form a "pseudo diffusion layer" at the film-base interface. This is due to the physical mixing phenomenon of substrate elements and film material elements at the film-base interface of the ion plating film of the vacuum coater. Because of the injection of high-energy particles, the sputtering of sputtered atoms and the recoil injection of surface atoms will cause non-diffusion mixing in the near-surface region, and this mixing effect will help form a "pseudo-diffusion layer" interface. This is very beneficial to improve the adhesion strength of the film-base interface.

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2. Enhanced diffusion High defect concentration and higher temperature near the surface area will increase the diffusion rate. Since the surface is a point defect, small ions have a tendency to segregate on the surface. Ion bombardment of vacuum coating equipment can further strengthen the surface segregation and enhance the mutual diffusion of deposited atoms and substrate atoms.

3. Improving the nucleation mode The characteristics of atom condensation on the surface of the substrate are determined by its surface interaction and its migration characteristics on the surface. If there is no strong interaction between the condensed atoms and the surface of the substrate, the atoms will diffuse on the surface until they nucleate at high-energy positions or are collided by other diffused atoms.

4. Preferential removal of loosely bonded atoms The sputtering of surface atoms depends on the local bonding state. Ion bombardment on the surface is more likely to sputter loosely bound atoms.

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5. Improve the surface coverage and increase the diffraction. The main reason for the diffraction of the ion plating of the vacuum coater is the higher working pressure, and the collision of the evaporated atoms by the gas atoms increases the scattering effect. However, the effect of ion bombardment can not be ignored.

Zunhua Baorui Titanium Technology Co., Ltd. is a well-known vacuum coating manufacturer, specializing in the manufacture of various vacuum coating machines, providing industry customers with customized process solutions and coating equipment.

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